E02800 - SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller StdVol-Flat Panel Display Alternate procedures may be used

Alternate procedures may be used if they meet the same analytical performance criteria

本文書の目的は，サーマル・マスフローコントローラの電磁感受性の評価および試験のための体系的方法を定めることである。

nonflammable

11-1106 (Reapproved 1211)

or are looking for company-wide access

E02800 - SEMI E28 - Guide for Pressure Specifications of the Mass Flow Controller StdVol-Flat Panel Display Alternate procedures may be used1 Purpose 1. 1 The purpose of this Guide is to establish a uniform, worldwide means to describe pressure parameters as they relate to mass flow controllers (MFC). It is intended to prevent confusion and misunderstanding between manufacturers and users. 2 Scope 2. 1 This Guide contains definitions of terms which describe gas pressure in MFCs as used in the semiconductor industry. SI units are the reference units for this Guide. Referenced SEMI