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polyetheretherketone (PEEK)
微粒子の静電気吸着を低減することによる汚染管理では，領域の静電気のリスクは静電気の電荷の存在とレベルによって定義される。
SEMI MF1366-0308 (Reapproved 0413)
or other layer condition
Recommended practices for delineation and observation of these artifacts are referenced
C02800 - SEMI C28 - フッ化ケイ素酸の仕様 Revision:SEMI C28-0306 - Superseded polyetheretherketone (PEEK)global Liquid Chemicals Committee2006116global Audits and Reviews Subcommittee20062www. semi. org20063CD ROM197820057 Referenced SEMI Standards SEMI C1 Guide for the Analysis of Liquid Chemicals
