E05413 - SEMI E54.13 - Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) Revision:SEMI E54.13-0303 - Superseded needed to normalize measured data

needed to normalize measured data to a reference temperature

For FOSBs used with 300 mm wafers

This Test Method is sometimes considered destructive due to the possibility of contamination from the Schottky contact formed on the wafer surface

This has been done to establish a base for SMIF port standardization

SEMI E154 — Specification for Mechanical Features of 450 mm Load Port

E05413 - SEMI E54.13 - Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) Revision:SEMI E54.13-0303 - Superseded needed to normalize measured data* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1