MF053400 - SEMI MF534 - Test Method for Bow of Silicon Wafers StdTpc-Wafer Shipping System are beyond the scope of

are beyond the scope of this Practice

• effects of repeatability

pressure transducers

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on or in the Si wafer surface and that extend along the wire direction

MF053400 - SEMI MF534 - Test Method for Bow of Silicon Wafers StdTpc-Wafer Shipping System are beyond the scope ofThis Standard was technically approved by the Silicon Wafer Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 11, 2014. Available at www. semiviews. org and www. semi. org in January 2015; originally published by ASTM International as ASTM F534 77T; previously published July 2007. The flatness of a wafer surface must be controlled to suit the requirements of fixtures and