Pay in 4 interest-free payments of $48.25 Learn more
Ships within 48 hours · Estimated delivery Sep 4 - Sep 9
The purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information
as specified by SEMI M74
and wafers
plastic substrates
2 The collection of process data during recipe execution is important to today’s factories to support various applications that help optimize equipment processes
E01904 - SEMI E19.4 - Specification for 200 mm Standard Mechanical Interface (SMIF) Revision:SEMI E19.4-0998E (Reapproved 0709) - Superseded The purpose of this StandardNOTICE: SEMI E19. 4 is no longer published within the SEMI E19 family of Standards. It is published and sold separately. A standard interface is required for containers intended to control the transport environment of cassettes containing substrates. The interface must address the proper container orientation for material transfer and maintain continuity between the container and equipment environment in order to control particulate matter. This
US$ 69.99
US$ 33.82
US$ 103.64
US$ 115.20
US$ 96.00
US$ 12.22
