M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded The key options used in

The key options used in the calculation are specified to define the data reported

SEMI MF1230-02 (first SEMI publication)

SEMI MF1617 — Test Method for Measuring Surface Sodium

a Standard defining the performance of a UPW system

SEMI D22-0818 (Reapproved 0924)

M00100 - SEMI M1 - Specification for Polished Single Crystal Silicon Wafers Revision:SEMI M1-0416 - Superseded The key options used in1 Purpose 1. 1 Single crystal silicon wafers are utilized for essentially all integrated circuits and many other semiconductor devices. To permit common processing equipment to be used in multiple device fabrication lines, it is essential for the wafer dimensions to be standardized. 1. 2 In addition, as technology advances to smaller and smaller dimensions for the elements of high density integrated circuits, it has become of interest to standardize