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This Practice is not recommended for use in defect density evaluations
This Standard was technically approved by the Silicon Wafer Global Technical Committee
SEMI M20-1110 (technical revision)
In this Document
its internal buffer space
E06600 - SEMI E66 - Test Method for Determining Particle Contribution by Mass Flow Controllers StdPbc-0226 This Practice is not recommendedThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8, 2016. Available at www. semiviews. org and www. semi. org in May 2017; originally published September 1997; previously published June 2011. The purpose of this Test Method is to measure particle contribution by mass flow controllers (MFCs) intended for use in high purity
