P04500 - SEMI P45 - マスク装置向けジョブデック・データフォーマットの仕様 Revision:SEMI P45-0708 - Superseded SEMI M79-0623 (technical revision)

SEMI M79-0623 (technical revision)

This Standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and inter-changeability at all mechanical interfaces

The components here include such consumable materials as sputtering gun with target material and repeatedly used chemicals in bath or container

SEMI S26-0709 (technical revision)

The second part (§ 9) specifies the presentation (i

P04500 - SEMI P45 - マスク装置向けジョブデック・データフォーマットの仕様 Revision:SEMI P45-0708 - Superseded SEMI M79-0623 (technical revision)global Micropatterning Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM20063 MALY Referenced SEMI Standards SEMI P39 OASISTM Open Artwork System Interchange Standard SEMI P44 Specification for Open Artwork System Interchange Standard (OASISTM) Specific to Mask Tools