E08800 - SEMI E88 - AMHS保管SEM（ストッカーSEM）の仕様 Revision:SEMI E88-0307 (Reapproved 0612) - Superseded 7-0304E (editorial revision)

7-0304E (editorial revision)

This Test Method describes a procedure to determine the ionic contamination on leadframe interleafing and the contamination transferred from the interleafing to the leadframes using a water extraction method

1 mm厚のガラス基板の水平搬送や保管に使用するカセットについて規定する。

5 Equipment suppliers should work with their customers to determine which additional GEM capabilities should be implemented for a specific type of equipment

SEMI D62-0611 (first published)

E08800 - SEMI E88 - AMHS保管SEM（ストッカーSEM）の仕様 Revision:SEMI E88-0307 (Reapproved 0612) - Superseded 7-0304E (editorial revision)global Information & Control Technical Committee2012221global Audits and Reviews Subcommittee20126www. semiviews. org www. semi. org199920073 : AMHSSEMSEMSEMI E30SEMSEM[SEMI E23] AMHSGEM13SEMI2SECS IISECSSC GEM13SEMGEM Referenced SEMI Standards SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer (SECS I) SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E23 Specification for Cassette Transfer Parallel I O