MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdPbc-1114 to assure that a gas

to assure that a gas is suitable for the common uses to which it may be put in the manufacture and processing of semiconductor devices and

and cassettes and that are manufactured for integration into semiconductor manufacturing equipment

本文書が対象とするステンレス製容器は、薬液を導出もしくは導入するチューブ有しており、そのチューブが容器内部に貫通しているものである。

and communication of thin film data is consistent among various parties who may need to concur on interpretation of the results of a thin film fabrication-process step

Automated material movement represents a significant milestone in the evolution of automation in semiconductor manufacturing

MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdPbc-1114 to assure that a gasThis standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. Referenced SEMI