P03000 - SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領 Revision:SEMI P30-0997 (Reapproved 1104) - Inactive SEMI M1-0305 (complete rewrite to

SEMI M1-0305 (complete rewrite to include all subordinate documents)

a basic set of common services (operations) between the FMCS and the FPUs are specified to exchange FPU status information and data

本基準係為針對各供應商及承攬商作業主管的責任建立標準。

Current edition approved by the North American Regional Standards Committee on August 28

SEMI MF1529-1110 (technical revision)

P03000 - SEMI P30 - 寸法測定用走査型電子顕微鏡（CD-SEM）の目録発行の実施要領 Revision:SEMI P30-0997 (Reapproved 1104) - Inactive SEMI M1-0305 (complete rewrite toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2004723Japanese Regional Standards Committee20049www. semi. org2004111997 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to