E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdPbc-0611 This Test Method is particularly

This Test Method is particularly applicable to clean

本ガイドは複数の目的で提供される。本ガイドは，高純度水（HPW）装置の新規購入に関する性能基準を設けるための基礎として用いてよい。また，設備エンジニアがHPWシステム運転時のプロセス制御パラメータを設定する目的で内部使用してもよい。さらに，施設によって供給されているHPWの品質について，プロセスエンジニアが合理的な期待を設定する目的で用いてもよい。

SEMI P45-0211 (technical revision)

This Specification does not address coding of wafer crystal properties that are provided in SEMI M13

This Network Communication Standard (NCS) taken together with the SEMI Sensor/Actuator Network Standard suite and the EtherCAT standard completely and unambiguously defines an open standard providing an industry specific solution to off-the-shelf interoperability of networked devices in semiconductor manufacturing equipment

E09800 - SEMI E98 - Provisional Standard for the Object-Based Equipment Model (OBEM) StdPbc-0611 This Test Method is particularlyPurposes of the Object Based Equipment Model include the following: Define a standard model for interfacing to multi process equipment and other complex equipment. Define standard equipment components so that communications can "discuss" component related issues. Provide an equipment model that can be easily integrated with SEMI E81 CIM Framework systems by connecting an OBEM compliant equipment to a Machine object. The purpose of the Object Based