S00700 - SEMI S7 - 半導體製造設備的安全衛生及環保評估報告之安全基準 StdPbc-1021 This Standard was technically approved

This Standard was technically approved by the HB-LED Global Technical Committee

本試験方法の目的は，MFCに関わる取付姿勢の影響を定量化する標準方法を提供することである。

Reduce the attraction of particles to charged surfaces

The width of the denuded zone (DZ) free of bulk micro defects (BMD) is also an important parameter

SEMI D31-0213 (technical revision)

S00700 - SEMI S7 - 半導體製造設備的安全衛生及環保評估報告之安全基準 StdPbc-1021 This Standard was technically approvedNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI S SEMI S SEMI S Referenced SEMI Standards SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing EquipmentSEMI S3 Safety Guidelines for Process Liquid Heating SystemsSEMI S6 EHS Guideline for Exhaust