G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer StdPbc-1116 This Standard was technically approved

This Standard was technically approved by the Assembly & Packaging Global Technical Committee

SEMI MF671-0707 (technical revision)

global Flat Panel Display – Factory Automation Committee で技術的に承認されている。現版は2008年5月13日，global Audits and Reviews Subcommitteeにて発行が承認された。2008年6月にwww

orgで入手可能となる。初版は1978年発行。前版は2005年11月発行。

SEMI E88-0702 (technical revision)

G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer StdPbc-1116 This Standard was technically approvedThis Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection. This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container. The