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SEMI M74-1108 (Reapproved 0413)
1-0226 — Specification for SECS-II Protocol for Control Job Management (CJM)
SEMI MF1771-0304 (technical revision)
SEMI MF1366-1107 (technical revision)
blend technique classification(s)
E03500 - SEMI E35 - Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment StdPbc-0813 SEMI M74-1108 (Reapproved 0413)The purpose of this Guide is to provide standard cost of ownership (COO) metrics for evaluating unit production cost effectiveness of manufacturing equipment in the semiconductor and related industries. This Guide establishes a procedure to facilitate an understanding of equipment related costs, including costs related to environmental, health, and safety (EHS) factors, by providing definitions, classifications, algorithms, methods, and example values
