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a guide to evaluating hermeticity of MEMS packages is required
This Test Method is applicable to material with TSD densities up to 5000 cm−2
In principle
測定機器
SEMI E5-0224 (technical revision)
F12000 - SEMI F120 - Test Method for the Electrochemical Critical Pitting Voltage Testing of Stainless Steel Used in Corrosive Gas Systems Revision:SEMI F120-0922 - Current a guide to evaluating hermeticityThe purpose of this Test Method is to determine the relative resistance to pitting corrosion of the wetted surfaces of components intended for use in corrosive gas distribution systems for semiconductor manufacturing. This Test Method is an adaptation of ASTM G61 and is intended to differentiate among manufacturing processes for stainless steel that can affect the performance of the wetted surfaces. This Test Method describes a procedure, based on the
