E04701 - SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers StdPbc-0218 while maintaining wafer quality and

while maintaining wafer quality and allowing automated use of the carrier

本仕様は，二次元のコードシンボルとそれに関連する英数字（読取用カメラとディスプレイで読み取り可能なもの）から成り，

for wafers to be used in these applications

secondary containers

1-0200 (technical revision)

E04701 - SEMI E47.1 - Mechanical Specification for FOUPS Used to Transport and Store 300 mm Wafers StdPbc-0218 while maintaining wafer quality andNOTICE: This Standard or Safety Guideline has Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 This Standard partially specifies the FOUPs used to transport and store 300 mm wafers in an IC manufacturing facility. 2 Scope 2. 1 This Standard is intended to set an appropriate level of specification that