D01500 - SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method Revision:SEMI D15-1296 (Reapproved 0703) - Inactive 2-0316 (Reapproved 0124)

2-0316 (Reapproved 0124)

The International System of Units (SI) is used as the standard unit of measure in this Document

本仕様は，半導体の製造に使用される空気圧動作シリンダバルブに対する最低限の設計及び性能の要求条件を確立する。本仕様は，更にこれらのバルブを調達する際の手引きとなるよう意図されている。

The interface specified in this Standard is designed for a tool with a sealed minienvironment

The purpose of this Standard is to define a test method used to determine the load impedance and efficiency of matching networks used in RF power delivery systems for semiconductor processing equipment

D01500 - SEMI D15 - FPD Glass Substrate Surface Waviness Measurement Method Revision:SEMI D15-1296 (Reapproved 0703) - Inactive 2-0316 (Reapproved 0124)This method was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the Japanese FPD Materials and Components Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published December 1996. This document covers the measurement of FPD glass substrate surface waviness by