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and a thickness of 700 µm
missing ball or crack to clarify the manufacturer’s responsibilities and to improve product yield
This standard is intended to set an appropriate level of specification that places minimal limits on innovation while ensuring modularity and interchangeability at common mechanical interfaces
2 Out of Scope
FPD用ガラス基板のベンダーおよび，あるいは購入者に使用される。
F11100 - SEMI F111 - Test Method for Equipment Fan Filter Unit (EFFU) Particle Removal Revision:SEMI F111-0413 - Current and a thickness of 700This Test Method covers a procedure for measuring particle removal characteristic of equipment fan filter unit (EFFU) installed inside equipment. Since EFFU is an assembly of particle filter, fan, and motor, the integrity of these parts is very important for the performance of EFFU. So a conventional particle removal test method for particle filters is not suitable to evaluate EFFU particle removal performance. This Test Method defines an evaluation
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