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SEMI C3 - Specifications for Gases
This Test Method describes a procedure
SEMI F62-0701 (first published)
This Standard was technically approved by the Assembly & Packaging Global Technical Committee
It is the intent of this Document to provide general guidelines for preparation of calibration gas mixtures in compliance with ISO 6142
F03800 - SEMI F38 - Test Method for Efficiency Qualification of Point-of-Use Gas Filters StdPbc-0124 SEMI C3 - Specifications forNOTICE: This Document was completely rewritten in 2019. The purpose of this Document is to define a comprehensive standard test sequence to qualify the particle filtration efficiency achievable using point of use (POU) gas filters. This Test Method defines an evaluation method for POU filters of various media (e. g., metallic, ceramic, and polymeric) typically used for filtering inert and process gases in semiconductor applications. POU filters are
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