F00700 - SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法 StdVol-Facilities SEMI E30-0997 (technical revision)

SEMI E30-0997 (technical revision)

This Test Method is especially applicable for silicon that has resistivity between 0

orgで入手可能となる。初版は1995年発行。前版は2008年11月発行。

transmission

While this Document makes frequent reference to electrostatic fields and effects

F00700 - SEMI F7 - フロロカーボン製チューブフィッティング接合部の引張り強さを測定するテスト方法 StdVol-Facilities SEMI E30-0997 (technical revision)Facilities CommitteeNorth American Facilities Committee199810North American Regional Standards Committee19992SEMI On Line199921992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. SIU. S. Referenced SEMI Standards None.