F00500 - SEMI F5 - Guide for Gaseous Effluent Handling StdPbc-0710 It has a choking odor

It has a choking odor

SEMI G63-95 (Reapproved 0811)

• Support equipment interconnects

SEMI E84-0304 (technical revision)

The scope of this Document covers all grades of 2-propanol used in the semiconductor industry

F00500 - SEMI F5 - Guide for Gaseous Effluent Handling StdPbc-0710 It has a choking odorNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This document, as balloted, is intended to replace SEMI F5 90 in its entirety. NOTICE: Paragraphs entitled "NOTE" are not an official part of this guide and are not intended to modify or supersede the official