E15100 - SEMI E151 - データ品質を理解するためのガイド Revision:SEMI E151-0309 - Superseded The orientation of semiconductor crystals

The orientation of semiconductor crystals and wafers as determined by these test methods is an important materials acceptance requirement because the orientation controls various parameters of semiconductor devices fabricated from the material

本スタンダードは

マーキングシンボルは，新品基板からフルにパターン化済みの基板まで，

It extends and specializes this Standard for application in semiconductor device and integrated circuit manufacturing

This Test Method is complementary to:

E15100 - SEMI E151 - データ品質を理解するためのガイド Revision:SEMI E151-0309 - Superseded The orientation of semiconductor crystalsglobal Information & Control Committee200912global Audits and Reviews Subcommittee20092www. semi. org20093CD ROM Referenced SEMI Standards SEMI E5 SEMI Equipment Communications Standard 2 Message Content (SECS II) SEMI E54 Sensor Actuator Network Standard SEMI E120 Specification for the Common Equipment Model (CEM) SEMI E125 Specification for Equipment Self Description (EqSD) SEMI E132 Specification for Equipment Client Authentication and