F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems StdPbc-0422 Accurately identifying the MS bias

Accurately identifying the MS bias and the size and nature of all sources of variability allows one to determine whether the MS is capable of performing its intended function

many changes in these conditions may be made for non-referee applications without severe changes in measurement results

1  This Guide contains definitions of terms which describe the effects of temperature upon mass flow controllers as used in the semiconductor industry

The values given in parentheses are for information only

This Safety Guideline applies to wafer handling robots and load ports that are being evaluated independently of SME

F04600 - SEMI F46 - Guide for On-Site Chemical Generation (OSCG) Systems StdPbc-0422 Accurately identifying the MS biasThis guide was technically approved by the global Facilities Committee and is the direct responsibility of the North American Facilities Committee. Current edition approved by the North American Regional Standards Committee on April 15, 1999. Initially available on www. semi. org August 1999; to be published September 1999. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been