P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Lang-English This Guide is the third

This Guide is the third in a series of SEMI Standards developed for UPW which include SEMI F61

1-0921 (technical revision)

SEMI PV58-0115 (first published)

SEMI D21-1000 (technical revision)

SEMI C30 — Specification for Hydrogen Peroxide

P01300 - SEMI P13 - Determination of Sodium and Potassium in Positive Photoresists by Atomic Absorption Spectroscopy Lang-English This Guide is the thirdThis standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1991. NOTICE: This Standard or Safety Guideline has an Inactive Status because the