E01400 - SEMI E14 - Measurement of Particle Contamination Contributed to the Product from the Process or Support Tool StdPbc-1213 thin film solar cell manufacturers

thin film solar cell manufacturers and PV concentrator manufacturers

SEMI S14-0521 (technical revision)

1-0706 (technical revision)

Czochralski technique or other controlled solidification methods

ARAMSに準拠するための基本的な要求事項

E01400 - SEMI E14 - Measurement of Particle Contamination Contributed to the Product from the Process or Support Tool StdPbc-1213 thin film solar cell manufacturersNOTICE: This document was withdrawn in accordance with the Regulations Governing SEMI Standards in 2003. The purpose of this document is to provide a standardized methodology and detailed procedure for measuring the contamination performance of a particular process or tool in terms of the number and size distribution of particles added to a silicon wafer as a result of having been passed through that process tool. Referenced SEMI Standards SEMI M10