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SEMI E1 — Specification for 3 inch
org in June 2007
12-89 (technical revision)
• Definition of interfaces for these FGs
currently under development
S01500 - SEMI S15 - Safety Guideline for the Evaluation of Toxic and Flammable Gas Detection Systems Revision:SEMI S15-0200 (Withdrawn 0707) - Withdrawn SEMI E1 — Specification forNOTICE: This Document was balloted and approved for withdrawal in 2007. This guideline provides considerations for the evaluation of fixed gas detection systems used to monitor for safety of plant personnel, product and materials, the local environment and community. It provides an evaluation guide and reference sources appropriate to facilities and equipment where toxic and flammable gases are used and stored in gaseous or liquid form. Referenced
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