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SEMI S2-0706b (delayed revision)
SEMI E88-1104E (editorial revision)
The test method is intended for in-line high throughput measurements
because this Test Method is independent of the metal's chemistry or electrical activity
In the case of this Guide
F10000 - SEMI F100 - Compliance Test Method for Minimum Flow Coefficient of Diaphragm Valve for Metric PFA Tube StdTpc-Gas Source Equipment SEMI S2-0706b (delayed revision)This test method was technically approved by the Global Liquid Chemicals Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on March 11, 2005. It was available at www. semi. org in June 2005. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to
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