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SEMI 3D15-0316 (first published)
Terminology for Through Silicon Via Metrology
This standard will specify measurement method and measurement points
defines the relationships of each of the other Specifications that are components of the SEMI SAN Standard
they are expected to be required for smaller feature sizes to meet CMP requirements
F02300 - SEMI F23 - Specification for Particle Concentration of Grade 10/0.2 Hydrogen StdTpc-Device Tracking SEMI 3D15-0316 (first published)This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 1, 2018. Available at www. semiviews. org and www. semi. org in May 2018; originally published June 1997; previously published July 2012. The purpose of this Document is to set a maximum permissible particle concentration for 10 0. 2 grade hydrogen and to describe a
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