S02200 - SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment Revision:SEMI S22-1110 - Superseded The purpose of this Safety

The purpose of this Safety Guideline is to provide information and methods related to flow limiting devices (FLDs) that limit the rate of release of hazardous gases during transportation

本ガイドラインは，Uniform Building CodeのH-6の分類，Uniform Fire Codeの51条又は80条，又はその他適用できるローカルコード，の監督下に置かれている産業において，危険な生産品材料を供給するパイプ類のための一般的要求条件をカバーするものである。

SEMI C21-0699 (first published)

This Guide applies to flat or curved samples of arbitrary shape

o multiple substrates where the substrates enter and exit the process module in a continuous flow where recipe execution for each substrate can be staggered

S02200 - SEMI S22 - Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment Revision:SEMI S22-1110 - Superseded The purpose of this SafetyThis Safety Guideline provides a set of design based electrical safety considerations for production equipment used in the semiconductor industry. Basic product safety concerns are addressed by satisfying the design, construction, and testing principles set in this Safety Guideline for protection against electrical shock or fire risk. The intent is to provide a design based electrical document that will be useful to both design engineers and