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This Document covers requirements for all grades of argon used in the semiconductor industry
Flat Panel Display）（FPD）用ガラス基板を，FPD製造工程で使用されている試薬を用いて定量的に評価する。
of the diborane (see Appendix 1)
a device to a carrier wafer) or permanently bonded
2グレードの窒素およびアルゴンバルク供給ガスの最大許容パーティクル濃度を設定すること(2)その確認のための基準方法を記述することである。
C02200 - SEMI C22 - Guide for Boron Tribromide Revision:SEMI C22-0212 - Inactive This Document covers requirements forThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www. semiviews. org and www. semi. org in February 2012; originally published in 1994; previously published March 2006. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have
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