C09100 - SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components StdTpc-Gases - Specialty 本スタンダードは，Liquid Chemical Global Technical Committeeで技術的に承認されている。現版は2013年6月4日，global

本スタンダードは，Liquid Chemical Global Technical Committeeで技術的に承認されている。現版は2013年6月4日，global Audits and Reviews Subcommitteeにて発行が承認された。2013年7月にwww

This standard specifies selected requirements of the cassettes used to ship flat panel substrates from the substrate finisher to the display maker and between process-added users

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colorless liquid which hydrolizes in the presence of moisture

C09100 - SEMI C91 - Test Method for Determination of Moisture Dry-Down Characteristics of Gas Delivery Components StdTpc-Gases - Specialty 本スタンダードは，Liquid Chemical Global Technical Committeeで技術的に承認されている。現版は2013年6月4日，globalNOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI F118. This Test Method describes the procedure for determination of the moisture dry down characteristics of components used in gas delivery systems. The results of this test can be used for the qualitative ranking of gas delivery components based on the design as it relates to moisture dry down performance of the system. This Test Method