M00300 - SEMI M3 - Specifications for Polished Monocrystalline Sapphire Substrates StdTpc-Electronic Data Interchange transport system controller architecture

transport system controller architecture

this document defines terms and metrics needed for quantifying the waviness of CSW

The system concept involves mating a door on a cassette container to a door on an equipment enclosure and transferring the cassette into

通信がコンポーネントに関する事項を「検討」できるように，標準装置を定義する。

orgで入手可能となる。初版は2000年10月発行。前版は2012年3月発行。

M00300 - SEMI M3 - Specifications for Polished Monocrystalline Sapphire Substrates StdTpc-Electronic Data Interchange transport system controller architectureThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on April 25, 2007. It was available at www. semi. org in June 2007. Originally published in 1978; previously published March 2004. NOTICE: This document was balloted and approved for withdrawal in 2007. Sapphire substrates are utilized for heteroepitaxial growth of silicon films for certain