G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials StdTpc-300 mm Carriers & Physical Interfaces It is not intended for

It is not intended for dark-field illumination

previously published October 2011

SEMI E29-93 (Reapproved 1104)

SEMI E168-1114 (complete rewrite)

SEMI MF1391-0704 (technical revision)

G06700 - SEMI G67 - Test Method for the Measurement of Particle Generation from Sheet Materials StdTpc-300 mm Carriers & Physical Interfaces It is not intended forNOTICE: This Document was reapproved with minor editorial changes. This Test Method describes a procedure to measure particles on sheet materials. The method described may be used for the measurement of particles on items such as: Leadframe Interleaves, Cleanroom Paper, and Packing Material. The procedures may be used by the material manufacturer for quality control or by a customer at incoming inspection. Referenced SEMI StandardsNone.