E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases StdPbc-0912 for use in judging quality

for use in judging quality of production and developing samples

· Simultaneous transfer of Material and its Material Data between adjacent equipment

it is assumed that the marking symbol will be obtained by laser marking individual dots

1  Within the semiconductor industry

and certification procedure for a bonded wafer reference sample composed of two wafers

E07700 - SEMI E77 - Test Method for Calculation of Conversion Factors for a Mass Flow Controller Using Surrogate Gases StdPbc-0912 for use in judging qualityThe purpose of this Test Method is to quantify a nominal average conversion factor from one gas to another for a mass flow controller (MFC) and to quantify the conversion factor as function of flow for an MFC. This procedure describes a method to determine the MFC conversion factor and function between two gases. This Standard provides a common basis for communication between manufacturers and users. The intent of this Standard is not to suggest any