E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA) Revision:SEMI E89-1106E - Superseded The following components are expected

The following components are expected to yield meaningful results when tested according to the present method: tubing

Because the profile which X

• Scatterometers — Total integrating scatterometers (TIS)

SEMI E160-1211 (Reapproved 0824)

and bulk properties

E08900 - SEMI E89 - Guide for Measurement System Analysis (MSA) Revision:SEMI E89-1106E - Superseded The following components are expectedNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Document was reapproved with minor editorial changes. The purpose of this Guide is to provide a consistent set of terminology and describe a simplified, but constructive, experimental approach to planning and