P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） Revision:SEMI P20-0703 - Inactive which define the properties of

which define the properties of the substrate and the epitaxial layer

SEMI E117-1104 (Reapproved 0710)

Device manufacturers use this standard when procuring processing equipment to specify to the equipment supplier the interface required for interchangeability of pumps

本スタンダードは，global Environmental Health & Safety Technical Committeeで技術的に承認されている。現版は2012年12月20日，global Audits and Reviews Subcommitteeにて発行が承認された。2013年2月にwww

The growing volume of production of poly-Si and sog-Si requires also an increase of quality control for these materials

P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） Revision:SEMI P20-0703 - Inactive which define the properties ofNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2003428Japanese Regional Standards Committee20036www. semi. org200371992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to