C05100 - SEMI C51 - Specification for Xylenes Revision:SEMI C51-0114 (Reapproved 1119) - Inactive and MGV equipment to the

and MGV equipment to the process tool

Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation

specifications

This Document covers requirements for boron trifluoride (BF3) used in the semiconductor industry

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C05100 - SEMI C51 - Specification for Xylenes Revision:SEMI C51-0114 (Reapproved 1119) - Inactive and MGV equipment to theThe purpose of this Document is to standardize requirements for xylene used in the semiconductor industry and to document testing procedures to support this Standard. Test methods have been shown to give statistically valid results. The scope of this Document is a grade of xylene used in the semiconductor industry. This material is a mixture of ortho, meta, and para isomers and ethyl benzene. Xylene (o , m , and p isomers) 99. 0% min and Ethyl benzene