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製品，またはレチクル
IMSは，表面の有機汚染を測定する，容易で，広汎に使用可能で，ぶれが少なくしかも感度の高い方法であることから，この汚染の測定法として選ばれている。
or vacuum) utilizing a technique such as detecting light from a sample region of the environment’s space
1 The scope of this Standard is all grades of acetone used in the semiconductor industry
originally published February 2008
E07400 - SEMI E74 - Specification for Vacuum Pump Interfaces - Turbomolecular Pumps StdTpc-Equipment Models 製品，またはレチクルNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Standard specifies the physical and electrical interfaces for turbomolecular pump (TMP) type vacuum pumps. Standardization of pump interfaces will allow for interchangeability of pumps. Device manufacturers use this
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