D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package StdPbc-0518 and capture rate

and capture rate

This Safety Guideline applies to semiconductor manufacturing equipment

SEMI C56-1116 (technical revision)

SEMI M93-0923 (first published)

Originally published February 2000

D08800 - SEMI D88 - Specification for Electrostatic Properties of FPD Photomasks and Blanks Package StdPbc-0518 and capture rate1 Purpose 1. 1 This Standard specifies the electrostatic properties required for cases used for transportation of photomasks and blanks used in FPD manufacturing to reduce the risk of electrostatic discharge (ESD) damage to photomasks and blanks during transportation or storage. 2 Scope 2. 1 This Standard provides the specifications of the electrostatic properties of the basic packaging of cases used for transportation of photomasks and blanks used in