C02400 - SEMI C24 - Specification for n-Butyl Acetate Revision:SEMI C24-0301 - Superseded この文書は，

この文書は，

This specification was technically approved by the global Flat Panel Display Committee and is the direct responsibility of the North American Flat Panel Display Committee

The purpose of this Document is to provide specification for octafluorocyclobutane (C4F8)

Control of parameters such as bonded wafer stack (BWS) thickness

本スタンダードでは，基板

C02400 - SEMI C24 - Specification for n-Butyl Acetate Revision:SEMI C24-0301 - Superseded この文書は，NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to standardize requirements for n butyl acetate used in the semiconductor industry and to document testing procedures to support those specifications. Test methods have been shown to