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this Specification provides state models and scenarios that define the host interaction with the equipment for the following:
This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21
The purpose of this Document is to define terminology and to recommend minimum periods for the shelf lives of specialty gases
This Document accomplishes this by defining an operational model for ISEM equipment as viewed by a factory automation controller
This edition was approved for publication by the global Audits and Reviews Subcommittee on December 8
C00335 - SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality Revision:SEMI C3.35-92 - Superseded this Specification provides state modelsThe purpose of this Document is to provide specification for hydrogen chloride (HCl) that is used in the semiconductor industry. This Document covers requirements for hydrogen chloride used in the semiconductor industry. Referenced SEMI Standards (purchase separately) None. Revision History SEMI C3. 35 0421 (technical revision) SEMI C3. 35 1109E (Reapproved 0815) SEMI C3. 35 1109E (editorial revision) SEMI C3. 35 1109 (technical revision) SEMI C3. 35
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