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This specification establishes a set of standards to assist in specifying and ordering large area masks for the Flat Panel Display industry
SEMI C23-0708 (technical revision)
The Guide takes the wetted-stream performance of virgin HPIX resin into consideration and reflects the current manufacturing processes of the resin manufacturers
It was replaced by SEMI C70
This standard was technically approved by the global Flat Panel Display Committee
C03600 - SEMI C36 - Specification for Phosphoric Acid Revision:SEMI C36-0705 - Superseded This specification establishes a setThe purpose of this Specification is to standardize requirements for phosphoric acid used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation. The scope of this Specification is for grades of phosphoric acid used in the semiconductor industry. Referenced
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