E16400 - SEMI E164 - Specification for EDA Common Metadata StdDcs-Inactive 20-1107 (first published)

20-1107 (first published)

The scope of this Standard lists the proposed impurity limits of trans 1

• Process fluids (liquids and gases)

SEMI E39 —Object Services Standard: Concept

Standardization of these component interfaces will allow for interchangeability of gas distribution system components

E16400 - SEMI E164 - Specification for EDA Common Metadata StdDcs-Inactive 20-1107 (first published)The purpose of this Specification is to promote commonality among implementations by defining common representations and conventions of equipment metadata based on SEMI E125 Specification for Equipment Self Description. The scope of this Specification includes: Common approaches for defining specific elements of equipment metadata The metadata representation of selected SEMI Communication Standards, including those widely used in 300 mm semiconductor