C10500 - SEMI C105 - Guide for Trace Iron Analysis in High Purity 2-Propanol (IPA) Revision:SEMI C105-0923 - Current 1 — Mechanical Specification for

1 — Mechanical Specification for FOUPs Used to Transport and Store 300 mm Wafers

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This identification is intended to occur both at the devices and at those places in the supplier-provided manuals where the devices are referenced in tasks or procedures

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These standardized feature requirements are intended to facilitate the interfacing of AGV

C10500 - SEMI C105 - Guide for Trace Iron Analysis in High Purity 2-Propanol (IPA) Revision:SEMI C105-0923 - Current 1 — Mechanical Specification forPurpose The purpose of this Guide is to recommend procedures for trace iron analysis in high purity 2 propanol (IPA) needed by the semiconductor industry. Scope The scope of this Guide is the measurement of iron concentration in IPA, used in the semiconductor industry, with higher purity than Grade 4 IPA described in SEMI C41. The quantitative range of this method is 1 to 100 ppt. Instruments (bottles, etc.) for sampling IPA to be analyzed are