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F07800 - SEMI F78 - Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications StdVol-Gases This specification is intended for

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Description

This specification is intended for use in North America as an emerging market

スタンダードは,Gases Global Technical Committeeで技術的に承認されている。現版は2011年9月12日,global Audits and Reviews Subcommitteeにて発行が承認された。2011年11月にwww

originally published in 1993

SEMI D38-0211 (technical revision)

and (3) using the aerosol to determine the counting efficiency of a CNC as a function of particle size

F07800 - SEMI F78 - Practice for Gas Tungsten Arc (GTA) Welding of Fluid Distribution Systems in Semiconductor Manufacturing Applications StdVol-Gases This specification is intended for1 Purpose 1. 1 The purpose of this Practice is to provide procedures for welding stainless steels and other corrosion resistant metals and alloys (CRAs) for fluid (liquid or gas) distribution systems in semiconductor manufacturing applications. Welds performed following these procedures are of sufficient quality to provide the required system purity, weld integrity, and weld strength for use in semiconductor manufacturing applications. 2 Scope 2. 1

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