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each FPD fab uses different handshake specifications for single substrate transfer
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and some are additionally capable of measuring surface nanotopography
The scope of this Specification is for one grade of n-butyl acetate used in the semiconductor industry
D04800 - SEMI D48 - Specification for Reference Position of Substrate ID to Specify Datum Line for ID Reader for Handing Off/On Tool Revision:SEMI D48-0307 - Superseded Available at wwwThis standard was technically approved by the global Flat Panel Display Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on September 5, 2007. It was available at www. semi. org in October 2007. This standard defines the datum line of an ID two dimensional code (hereafter, 2D ID) reader, by clarifying the positional relationship among equipment, AMHS (including equipment, loader unloader and robot),
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