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The purpose of this Document is to provide specifications for porogen precursors used in Low K CVD processes for which a need has been identified
there are often several words used by the semiconductor industry to describe the same concept or device
本仕様は，0
orgで入手可能となる。初版は1998年発行，前版は2009年11月に発行された。
equipment concept etc
C06900 - SEMI C69 - Test Method for the Determination of Surface Areas of Polymer Pellets StdPbc-0920 The purpose of this DocumentNOTICE: This Standard was completely rewritten in 2024. 1 Purpose 1. 1 This Test Method is a means of determining the surface area of polymer pellets. NOTE 1: The determination of surface areas in polymer pellets is important in semiconductor device manufacturing. Polymer pellets are the typical raw material input form for several thermoplastic processing techniques (e. g., blow molding, rotomolding, injection molding, transfer molding, and extrusion)
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