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it has been replaced by SEMI C59
specifications
Defining the terminology and the geometric properties of these edges will assist both the producers and users of substrates and processing/inspection equipment
providing particle control as risk mitigation for particle contamination on the wafer
This Document provides a test method for determining the roughness of polymer surfaces using contact profilometry (CP)
C00200 - SEMI C2 - Specifications for Etchants Revision:SEMI C2-95 (Withdrawn 0308) - Withdrawn it has been replaced byThis standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. Originally published in 1995. NOTICE: This Document was balloted and approved for withdrawal in 2008. The SEMI Committee on Chemical Reagents began its efforts on etchants in 1979. With this publication, the
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