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P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System Revision:SEMI P42-0304 - Inactive SEMI MF1390-0707 (Reapproved 0512)

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Description

SEMI MF1390-0707 (Reapproved 0512)

This Specification defines the acceptance criteria for stamped leadframes for plastic molded S

·    Ion implant equipment

SEMI M43-0418 (technical revision)

A particular course of action is suggested for energy

P04200 - SEMI P42 - Specification of Reticle Data for Automatic Recipe Transfer to Wafer Exposure System Revision:SEMI P42-0304 - Inactive SEMI MF1390-0707 (Reapproved 0512)This specification was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on January 9, 2004. Initially available at www. semi. org February 2004; to be published March 2004. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not

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